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Chemistry
Chemical engineering
Atomic layer deposition
Preferred term
Atomic layer deposition
Type
Topic
Broader concept
Chemical engineering
Identifier
HUME63082
In other languages
Norwegian Bokmål
Atomlagsdeponering
ALD
Norwegian Nynorsk
Atomlagsdeponering
URI
http://data.ub.uio.no/humord/c63082
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Created 2/13/24, last modified 2/13/24