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Concept information

Engineering > Electrical engineering > Electronics > Microelectronics > Microelectromechanical systems

Preferred term

Microelectromechanical systems  

Type

  • Topic

Broader concept

Entry terms

  • Micromachines
  • Microscopic electrical mechanical systems
  • Micro systems technology
  • Nanoelectromechanical systems

Identifier

  • HUME63933

In other languages

URI

http://data.ub.uio.no/humord/c63933

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