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Concept information

... > Engineering > Electrical engineering > Electronics > Electronic circuits > Integrated circuits > Photolitography

Preferred term

Photolitography  

Type

  • Topic

Broader concept

Entry terms

  • Microlithography
  • Nanolitography
  • Optical litography
  • UV litography

Identifier

  • HUME66802

In other languages

  • Fotolitografi

    Norwegian Bokmål

  • Fotolitografi
  • Mikrolitografi
  • Nanolitografi
  • Optisk litografi
  • UV-litografi
  • Mikrolitografi

    Norwegian Nynorsk

  • Nanolitografi
  • Optisk litografi
  • UV-litografi

URI

http://data.ub.uio.no/humord/c66802

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